A Comparative Study of Symmetric and Asymmetric PD SOI MOSFETs

碩士 === 國立交通大學 === 電子工程系所 === 95 === This study presents a systematic comparison between symmetric (conventional halo implant at both source and drain side) and asymmetric (halo implant at source side only) channel engineering of partially depleted (PD) SOI MOSFETs. Our investigation includes the lea...

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Bibliographic Details
Main Authors: Ping-Cheng Chang, 張秉真 
Other Authors: Pin Su
Format: Others
Language:en_US
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/skye3q

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