The Innovative Calibration Method on Large Area Mask Exposure Machine
碩士 === 國立交通大學 === 工學院碩士在職專班精密與自動化工程組 === 95 === Currently, it is very expensive or hard to produce a full stage “golden plate” for large area mask fabricators to calibrate their stage of the exposure tool. Furthermore, it is lack of recessive calibration data or theoretical information for implement...
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| Format: | Others |
| Language: | zh-TW |
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42333932468253027061 |