The Elliposometric Measurements of a curved surface
碩士 === 國立交通大學 === 光電工程系所 === 95 === This work presents a three-intensity measurement technique to determine the ellipsometric parameters (Ψ,Δ) of a curved surface in a polarizer–sample-analyzer (PSA) imaging ellipsometry. After a careful calibration on the azimuth position of the water-surface, we...
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/44939906262874610351 |
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ndltd-TW-095NCTU51240742016-05-04T04:16:29Z http://ndltd.ncl.edu.tw/handle/44939906262874610351 The Elliposometric Measurements of a curved surface 影像式橢圓儀在曲面薄膜量測 Chen Yo Lee 李振佑 碩士 國立交通大學 光電工程系所 95 This work presents a three-intensity measurement technique to determine the ellipsometric parameters (Ψ,Δ) of a curved surface in a polarizer–sample-analyzer (PSA) imaging ellipsometry. After a careful calibration on the azimuth position of the water-surface, we can prove that the azimuth deviation of polarizer is caused by the local surface normal; thus, we not only can determine the radius curvature of the curved surface, we also can correct its incident-angle from the measurement. Moreover, utilizing the ellipsometric parameters, we can calculate the thickness of the thin film coated on a curved surface. Y. F. Chao 趙于飛 2007 學位論文 ; thesis 44 zh-TW |
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NDLTD |
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zh-TW |
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Others
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NDLTD |
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碩士 === 國立交通大學 === 光電工程系所 === 95 === This work presents a three-intensity measurement technique to determine the ellipsometric parameters (Ψ,Δ) of a curved surface in a polarizer–sample-analyzer (PSA) imaging ellipsometry. After a careful calibration on the azimuth position of the water-surface, we can prove that the azimuth deviation of polarizer is caused by the local surface normal; thus, we not only can determine the radius curvature of the curved surface, we also can correct its incident-angle from the measurement. Moreover, utilizing the ellipsometric parameters, we can calculate the thickness of the thin film coated on a curved surface.
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| author2 |
Y. F. Chao |
| author_facet |
Y. F. Chao Chen Yo Lee 李振佑 |
| author |
Chen Yo Lee 李振佑 |
| spellingShingle |
Chen Yo Lee 李振佑 The Elliposometric Measurements of a curved surface |
| author_sort |
Chen Yo Lee |
| title |
The Elliposometric Measurements of a curved surface |
| title_short |
The Elliposometric Measurements of a curved surface |
| title_full |
The Elliposometric Measurements of a curved surface |
| title_fullStr |
The Elliposometric Measurements of a curved surface |
| title_full_unstemmed |
The Elliposometric Measurements of a curved surface |
| title_sort |
elliposometric measurements of a curved surface |
| publishDate |
2007 |
| url |
http://ndltd.ncl.edu.tw/handle/44939906262874610351 |
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