| Summary: | 碩士 === 國立交通大學 === 光電工程系所 === 95 === This work presents a three-intensity measurement technique to determine the ellipsometric parameters (Ψ,Δ) of a curved surface in a polarizer–sample-analyzer (PSA) imaging ellipsometry. After a careful calibration on the azimuth position of the water-surface, we can prove that the azimuth deviation of polarizer is caused by the local surface normal; thus, we not only can determine the radius curvature of the curved surface, we also can correct its incident-angle from the measurement. Moreover, utilizing the ellipsometric parameters, we can calculate the thickness of the thin film coated on a curved surface.
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