A Sampling and Simulation Method for Measurement Points on Wafers Using Clustering Analysis
碩士 === 國立交通大學 === 工業工程與管理系所 === 95 === In recent years, the semiconductor industry reduces the production costs by increasing the wafer size and enhancing the yield. When the wafer size is small, the quality information of a wafer can be obtained by measuring few fixed-points on a wafer. As the wafe...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03448166726832795833 |