The vector analysis and the application of fringe reflection method

• Main Authors: Shao-lun Yang, 楊韶綸
• Other Authors: Yuan-Fang Chen
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/91001590554834236228

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 95 === In this paper, the major purpose is to set up a high reflection surface measurement system with fringe reflection method and to perform fringe reflection method by making use of vector analysis. First,we introduce the primitive theory (“geometry method” for short)and the vector analysis theory (“vector method” for short) for fringe reflection method, and devise an experiment to verify vector method. Then, we compare geometry method with vector method by simulated method and assay the error. Finally, we establish optical measurement system by vector method , phase shift method, phase unwrap method…etc. , then we measure the wafer’s profile by our system. About the accuracy of our system, by comparing with the surface roughness measuring instrument ET3000, the average error is under 0.7 μm, the maximum error is under 1.4μm.