A study on design and control of a low-friction pneumatic serove table

• Main Authors: Jun-Yu Chuang, 莊潤郁
• Other Authors: Ming-Chang Shih
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/58065716978944703208

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 95 === The nonlinear friction effects the positioning accuracy very much, so the study of nonlinear friction is very important. It is hard to reach the precise position controlling because of the friction of sticking-slipping effect on the usual pneumatic servo table. In order to overcome the sticking-slipping effect of the pneumatic table to enhance positioning accuracy, we design a pneumatic table with diaphragm to decrease the friction of the system . First, we set up a table with friction surveying instruments and then plot the relation curves between friction and velocity by experimental results. The hybrid fuzzy controller with the fuzzy tuning dead-zone compensator are proposed in this paper. From the experimental results, in case of different position, the positioning accuracy can reach within the 0.08μm without load and under 40 newton loading . Using load compensation, the steady state error can reach within 0.08um which is under the 40 newton axial loading. Eventually, according to positioning control result design a velocity feedback compensation, which can make system reduce oscillation and rise the positioning accuracy.