The Effects of Dopants and Deposition Conditions on the Characterization of ZnO Thin Films and Its Applications on Gas Sensors
碩士 === 國立成功大學 === 電機工程學系碩博士班 === 95 === In this study , Poly-crystal ZnO films have been grown by RF magnetron sputtering technique and were investigated the CO gas sensing properties . First , the deposited films were characterized as a function of argon-oxygen gas flow ratio, deposited time, subst...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98469575003373139024 |