Effect of vacuum sintering temperature for microstructure and mechanical properties of Cr-Si alloy

Effect of vacuum sintering temperature for microstructure and mechanical properties of Cr-Si alloy

碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 95 === Along with semi-conductor unit system change with each passing day, ULSi takes Si wafer as Substrate become more and more complex.Metal- Silicides have the advantage which lowers the junction contact resistance, the gate resistance, then enhances the device...

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Bibliographic Details
Main Authors:	Yi-fang Yang, 楊怡芳
Other Authors:	Shin-chin Lee
Format:	Others
Language:	zh-TW
Published:	2007
Online Access:	http://ndltd.ncl.edu.tw/handle/74492492646697558624

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