Effect of vacuum sintering temperature for microstructure and mechanical properties of Cr-Si alloy
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 95 === Along with semi-conductor unit system change with each passing day, ULSi takes Si wafer as Substrate become more and more complex.Metal- Silicides have the advantage which lowers the junction contact resistance, the gate resistance, then enhances the device...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2007
|
Online Access: | http://ndltd.ncl.edu.tw/handle/74492492646697558624 |