Effect of vacuum sintering temperature for microstructure and mechanical properties of Cr-Si alloy

• Main Authors: Yi-fang Yang, 楊怡芳
• Other Authors: Shin-chin Lee
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/74492492646697558624

碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 95 === Along with semi-conductor unit system change with each passing day, ULSi takes Si wafer as Substrate become more and more complex.Metal- Silicides have the advantage which lowers the junction contact resistance, the gate resistance, then enhances the devices’ driving current, reaction time or operation velocity. As a result of traditional casting metallurgy (Ingot Metallurgy, IM)have the limits. After the slow coagulation ,the metal ingot have the ingredient segregation, the porosity and non-uniform microstructure defects. Although it may improve these phenomena by the heat treatment and the hot-working, but actually is unable completely to eliminate; But the powder metallurgy(PM)-Vacuum sintering to be allowed to get the high density ,the close crystal grain size, the uniform microstructure , isotropy and so on the fine mechanical property. This research dicuss effect of vacuum sintering temperature for microstructure and mechanical properties of Cr-Si alloy. In the Cr-Si experiment uses two kind of different proportions Cr-65wt%Si and Cr-50wt%Si; and different sintering temperature.Uses Transverse Rupture Strength(TRS) test, porosity, 4-point probe, SEM and microstructure analysis to estimate effect of vacuum sintering temperature for microstructure and mechanical properties of Cr-Si alloy. The experiment as results show that 1330°C vacuum sintering for Cr-65wt%Si and 1410°C vacuum sintering for Cr-50wt%Si was optimum. It can improve the microstructure ,and mechanical properties of Cr-Si alloy.