The best control of advance process control in semi-conductor diffusion area by using Taguchi method
碩士 === 國立成功大學 === 工程科學系專班 === 95 === In recent years, how to reduce the costs and enhance the qualified yield has become the direction of improvement for the semiconductor industry. The factors related to cost saving include the reduction of the wired width, increase of wafer size, enhancement of th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83743088415490911550 |