Investigation of High Performance Miniature Condenser Microphone
碩士 === 國立中興大學 === 精密工程學系所 === 95 === This thesis integrates the MEMS and semiconductor techniques to develop a new acoustic sensor. This acoustic sensor is a condenser microphone. Our study mainly was divided into two parts：One is the design and simulation of the miniature condenser microphone and t...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/75731464279944226429 |