| Summary: | 碩士 === 國立中興大學 === 精密工程學系所 === 95 === A compliant bistable mechanism is designed in this research. It is actuated by an electro-thermal actuator. The main characteristics of the actuator, such as the amount of displacement, the direction of movement, actuating voltage, and temperature distribution etc., are studied with consideration of the effects of surface thermal conduction, thermal convection and heat radiation. With voltage applied to the electro-thermal actuator, the amount of displacement and the variation of the reaction force of the compliant bistable mechanism is studied.
A commercial finite element analysis software, ABAQUS 6.4, is used for the simulation. We simulate the stable thermal field of the electro-thermal actuator and the deformation of its structure, and the amount of displacement and the variation of the reaction force of the compliant bistable mechanism. A fabrication process of the compliant bistable mechanism and the electro-thermal actuator is proposed.
Keywords: MEMS , Compliant bistable mechanism , Electro-thermal actuator
|
|---|
