Stress Analysis and Discussion of Multi-Layer Thin Film
碩士 === 國立中興大學 === 應用數學系所 === 95 === In this study, a simple mechanical model modified from the Stoney formula is presented for the calculation of residual stresses in thin films. The Stoney formula was derived based on the assumption of equi-biaxial residual stress in thin films. According to the ex...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56328969063610765829 |