Fabrication of high aspect ratio metal nanoprobes array

• Main Authors: Chung-Te Chou, 周仲德
• Other Authors: 王國禎
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/59800295850182342700

碩士 === 國立中興大學 === 機械工程學系所 === 95 === In this research, fabrication of high aspect ratio (>100) metal nanorod arrays by using the micro electroforming technique with an anodic aluminum oxide (AAO) as the template was investigated. Due to the electrophoresis and electric double-layer effects, the metal deposition rate inside a nanochannel is much slower than which at a micro mold. The annealing process was implemented following electroforming to enhance the mechanical properties of the deposited metal nanorods. The phosphoric acid was the used to gradually etch off the alumina that enclosed each individual metal nanorod to reveal the alumina-metal coaxial or pure metal nanorod array. A nanorod that consists of a metal top and an alumina-metal coaxial bottom can be fabricated by immersing the top of the nanorod into a sodium hydroxide solution. The diameter and height of the metal nanorod can be controlled by the size of the AAO pore and the deposition duration, respectively. The metal nanorod array can be further implemented as a nano-biosensor to measure the impedance and resonance frequency of a living cell.