| Summary: | 碩士 === 中興大學 === 物理學系所 === 95 === Two main research subjects are present in this thesis.Part1
focuses on the fabrication of patterned ZnO nanorods. By the vaper-lique-solid process, we have grown ZnO nanorods and Sn doped Zno nanorods on Si(111) .In the second part, we implanted Mn ion into ZnO nanorods by ion implantation, which results in one dimensional dilute magnetic semiconductor.
PartΙ
Fabrication of hexagon array of ZnO nanorods is accomplished by the technology of nanoshpere lithography. From the XRD and TEM data, we find wurtzite structure of ZnO nanorods, which has and the superiority of growing along C-axis in a [0002] direction. In the measurements of Photoluminescence measurement（PL）, the ZnO nanorods on Si(111) exhibit a strong UV emission and absorption at around 380nm, and an energy bandgap around 3.3eV.
PartⅡ
We fabricated dilute magnetic semiconductor with room
temperature Hc successfully, and after annealing（at 700℃ for 60mins）.The Mn doped ZnO nanorods have magnetism phenomenon with Tc above room temperature. As temperature goes down, Hc increases. As a result, annealing process can repair defects to form ferromagnetic ZnO nanorods.
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