Fabricated the Size-Controllable InGaN-based Nanorod Structures
碩士 === 國立中興大學 === 材料工程學系所 === 95 === We report a novel method to fabricate controllable dimension and density of GaN-based nanorod by varying Ni-mask and TiO2 nono- particle layer thickness using ICP-RIE etching. The nanorod surface morphology and structure are observed through the Optical microscop...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/75212669478157874067 |