Structural and mechanical properties of Cr-N-C-O thin films synthesized by a cathodic arc deposition process

• Main Authors: Shun-Jan Yang, 楊順然
• Other Authors: Yin-Yu Chang
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/64163931201648267866

碩士 === 明道大學 === 材料暨系統工程研究所 === 95 === Chromium carbide and chromium oxide coatings deposited by physical vapor deposition methods have been successfully applied in molding industries for their excellent tribological performances. In addition, nanocomposite coatings have recently attracted much interest because of their high hardness, wear resistance, and good thermal and chemical stability. In this study, Cr-N-C-O nanocomposite coatings were synthesized by cathodic-arc evaporation with plasma enhanced duct equipment. A carbon-oxide reactive gas was introduced to react with chromium to form Cr-N-C-O nanocomposite coatings during the deposition process. The effect of carbon and oxygen content on the microstructure and mechanical properties of Cr-N-C-O nanocomposite coatings were studied. Emission spectra of the plasma in front of the Cr cathodes were recorded using an in-situ optical emission spectrometer. In this study, field emission scanning electron microscope, transmission electron microscope and X-ray diffraction using Bragg-Brentano and glancing angle parallel beam geometries were used to characterize the microstructure and stress of the deposited films. The composition and chemical bonding of deposited Cr-N-C-O coatings were evaluated by X-ray photoelectron spectroscopy. Hardness, Young’s modulus and adhesion strength of the coatings were determined by nano-indentation and Rockwell indentation methods. It has been found that the mechanical properties of the films were correlated with the nanocomposite structure.