| Summary: | 碩士 === 國立高雄應用科技大學 === 電子與資訊工程研究所碩士班 === 95 === In the study, the ZnO/Pt/ZnO multilayer films were deposited on glass substrate by Sol-Gel process and D.C. magnetron sputtering technique. The effects on transmittance and resistivity of ZnO/Pt/ZnO multilayer films with various combinations of the thickness of ZnO and Pt films were investigated. Furthermore, the bottom layer of ZnO thin films were annealed at different temperatures in ambient atmosphere and the effects on transmittance and resistivity of the ZnO/Pt/ZnO multilayer films with the bottom ZnO thin film annealed at various temperatures were also discussed.
Based on the experimental results, the transmittance and resistivity of the as-grown ZnO/Pt/ZnO multilayer films were 69.06% and 5.12×10^0(Ohm-cm), respectively. After the bottom ZnO thin film annealed at 600℃, the transmittance and resistivity of the ZnO/Pt/ZnO multilayer films were increased to 74.58% and decreased to 1.02×10^0(Ohm-cm), respectively.
|
|---|
