Using thermal desorption system to analyze thermal stability of ZnO：MgF2 transparent conductive films
碩士 === 崑山科技大學 === 電機工程研究所 === 95 === Thermal desorption behavior of magnesium fluorine doped zinc oxide (ZnO: MgF2) film prepared under different process parameters has been investigated. It was found all four elements: Zn, O, Mg and F are thermally desorbed from film and fluorine has the highest de...
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| Format: | Others |
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51508116298852036658 |