The Study of the Nano Pore Alumina Template for Growing Carbon Nanotubes

• Main Authors: Fang-Bin Zhang, 張芳賓
• Other Authors: Meiso Yokoyama
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/98672735196517545531

碩士 === 義守大學 === 電子工程學系碩士班 === 95 === This study was divided into two parts. The first part was fabricating the anodic alumina oxide (AAO) template on alumina template, and the second part was the synthesis of carbon nanotubes (CNTs) on the AAO template successfully. The formed rate of alumina oxide is about 0.3 μm/min and the diameter and density of pore were discussed by changing the first anodization time when fabricating the AAO template. The optimum diameter and density of pore are 90 nm and 1.4×1010 pores/cm2, respectively, in 10 hours of the first anodization time. The irregular pore on the AAO surface was cleaned by etching technique. The optimum etching parameters were found to be 10 minutes in temperature of 30 ℃ and the concentration of 3 wt.% phosphoric acid, and the etching rate of alumina oxide was measured about 2 μm/min. The diameter and the density of pore are 50 nm and 1.12×1010 pores/cm2, respectively, by he second anodization and pore widening process to form the well-aligned nanopore array AAO template. In order to synthesize CNTs on the AAO templates, the catalyst must be deposited in the bottom of AAO pore and the carbon source access to the pore well-oiled. To our purpose, the thickness of alumina oxide must be reduced to get the carbon source into pore. The thickness of AAO template is about 1μm and the diameter of pore is 50nm fabricated by using the alumina oxide formed rate of 0.3 μm/min and the etching rate of 2 μm/min appropriate for the synthesis of CNTs in the thermal chemical vapor deposition (T-CVD) system. The catalyst Co deposited in the bottom of AAO nanopore by using alternating current 13.5 V and we synthesize CNTs in the T-CVD system using mixture gas of CH4 50sccm and H2 50sccm as carbon source in the temperature of 700℃. And then we observe the morphology of CNTs on the AAO template and find the optimum time to synthesize CNTs. The CNTs array has acquired as well-aligned and highly density about 1 ×1010 CNTs/cm2 array in 20 minutes and the diameter is 50 nm.