Examination of the Design of Micro Torsion-Mirrors by Simulation and Experiments
碩士 === 華梵大學 === 機電工程研究所 === 95 === In this paper, the design of the micro cross torsion mirror is examined by using simulation and experiment. Two types of the micro torsion mirror device can be obtained through the processes of fabrication. In the analysis of simulation, the design of micro torsion...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97888011342317559595 |