| Summary: | 碩士 === 逢甲大學 === 資訊電機工程碩士在職專班 === 95 === Many computerized manufacturing systems have been developed to enhance and to automate manufacturing processes. Especially, the semiconductor industry needs an innovative technical solution to deal with the rapidly changing of production process and to improve the product yields. Currently, the development and implementation of the majority of semiconductor manufacturing systems follow a framework called Computer-Integrated Manufacturing (CIM). To improve the design and implementation with the CIM framework, we propose a service-oriented
architecture (SOA) based environment for integrating semiconductor manufacturing systems.
In this thesis, we aim at building a platform to integration overall systems with service-oriented architecture in semiconductor manufacturing. Many domain services are designed and created for particular functionality or activity. The platform is collection and management these domain services to increased system development and flexibility. It not merely
include the factory operation level or factory engineering level that even extend to business level reaching the business system automation. Platform provides essential system services, engines, and components for system execution successfully.
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