Study on the Thermionic-Enhanced Sputter Deposited Indium Tin Oxide on Polyethylene Terephthalate

• Main Authors: Wu-chung Peng, 彭武章
• Other Authors: none
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/42687826451642499399

碩士 === 逢甲大學 === 材料與製造工程所 === 95 === The current display and solar energy products include liquid crystal display, organic light emitting display, plasma display, notebook computer, cellular phone, digital camera and sensitized solar energy panel, etc.; most of them are still based on glass as the substrate, which suffer from the disadvantages such as fragile, thick and heavy and non-impact-resistant, etc. However, flexible substrate has the advantages such as: light weight, thin thickness, impact-resistance, easy-to-carry, etc.; therefore, flexible substrates have drawn the attention of many R&D units. However, the flexible conductive substrates are usually accompanied with disadvantages such as: high thermal expansion coefficient, low chemical-resistance, low gas barrier property, low heat-resistance, easy warp, insufficient rigidity, etc.; therefore, traditional magnetron sputtering machine can not be used to grow high quality transparent conductive film, and the progress in the development of flexible display as well as solar energy industry. The main objective of this thesis is to study the effect of the setup of hot filament assistance in the DC magnetron sputtering system; the hot ionized electrons are used to activate the species in the plasma so as to enhance the plasma density, and it is hoped that the deposition temperature can be reduced through this system and high optical transparency and low coefficient of resistivity can be obtained from the PET flexible substrate. The sputtered ITO thin films with and without the use of hot filament assistance are compared to investigate the micro structure, electrical property, optical property, maximum flexure and flexure lifetime of the ITO thin film; we hope that the soft conductive substrate can meet the requirements in the development of display or solar energy industry. The experimental result shows that: Without hot filament assistance to sputter ITO thin film, the structure of the ITO film is none crystallize and the coefficient of resistivity is 1.7×10-3 Ω-cm. For the optical transmission measurement result, the average value is not more than 74%. It could bear curvature radius only 16.95 mm and the flexible lifetime could not over 100 times. With hot filament assistance the structure of the ITO film is crystallize and the coefficient of resistivity is 4.21×10-4 Ω-cm. For the optical transmission measurement result, the average value is more than 80%. It could bear curvature radius 13.87 mm after the flexure and flexure lifetime test, the one with hot filament assistance shows better flexure property and with flexure lifetime of more than 1200 times.