On-Wafer Performance Analysis for ISFET Sensor and its Flow Injection-Type Analysis
碩士 === 中原大學 === 電子工程研究所 === 95 === The purpose of this research On-Wafer performance analysis for ISFET sensor. Include the variation of threshold voltage and Flow Injection Analysis for ISFET. Impact on sensitivity 、drift 、temperature coefficient(TCF) of the sensor of the flow rate of fluid. Used t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74476064823535838143 |