Application of Clustering Algorithm to the Facility Planning of Wafer Fabrication
碩士 === 中原大學 === 工業工程研究所 === 95 === Facility planning is crucial to the performance of wafer fabs in semiconductor industry. This research proposes a clustering algorithm to develop and evaluate initial fab design alternatives. Clustering algorithm analyzes and allocates the tools for processing st...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75291700543659555457 |