The study of high speed micro-drilling performance and hole quality of diamond-like carbon coatings by doping with zirconium and nitrogen
碩士 === 建國科技大學 === 自動化工程系暨機電光系統研究所 === 95 === ABSTRACT In this study, the DLC coatings were prepared usingthe closed field unbalanced magnetron sputtering method. This study investigates the drilling performance of micro-drilling used different nitrogen gas flow on DLC coatings. Experimental res...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/79884525819586352720 |