The study of high speed micro-drilling performance and hole quality of diamond-like carbon coatings by doping with zirconium and nitrogen

• Main Author: 江彥明
• Other Authors: 高文顯
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/79884525819586352720

碩士 === 建國科技大學 === 自動化工程系暨機電光系統研究所 === 95 === ABSTRACT In this study, the DLC coatings were prepared usingthe closed field unbalanced magnetron sputtering method. This study investigates the drilling performance of micro-drilling used different nitrogen gas flow on DLC coatings. Experimental result show that the lowest driller diameter wear is 1N(2) coating, the 1N(2) coating possesses the lowest nail head and the 1N(2) coating possesses the lowest roughness of drilled hole. With above-mentioned experiments and results of analysis. Is it cover DLC membrane get into needle and uncoated little needle diameter person who wear and tear, nail heading size, hole wall roughness a little each other a little to have to find. 1N(2) Improvement which plates layer is most, improve and hole and count it to more than 6000 holes, the ones that can make and bore and pare using for PCB capillary are plated layer bestly. Key word: DLC ; high speed micro-drills performance ; PCB