Run-to-Run Control of Mix-Product Semiconductor Processes
碩士 === 中華大學 === 機械與航太工程研究所 === 95 === This thesis developed an advanced control technology for mix-product semiconductor processes. The conventional run-to-run process control for single-tool and single-type-product processes was improved to that for mix-tool and mix-product processes through indivi...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85667049002411454106 |