Run-to-Run Control of Mix-Product Semiconductor Processes

• Main Authors: Wang Li-Fu, 王立夫
• Other Authors: Chen Juhn-Horng
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/85667049002411454106

碩士 === 中華大學 === 機械與航太工程研究所 === 95 === This thesis developed an advanced control technology for mix-product semiconductor processes. The conventional run-to-run process control for single-tool and single-type-product processes was improved to that for mix-tool and mix-product processes through individually estimating the disturbances induced by tools and products. The proposed controller, termed D-JADE, can estimate the shift and drift disturbances simultaneously for the drifting semiconductor processed by two estimators, one for shifts and the other for drifts. The simulation results demonstrate that the performance of the proposed controller is higher than those of existed controllers for the drifting mix-product semiconductor processes.