Microwave MEMS Switches and Their Applications

• Main Authors: Chang-Chih Liu, 劉昌熾
• Other Authors: Chia-Chan Chang
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/95968835711150556474

碩士 === 國立中正大學 === 電機工程所 === 95 === The range of application of MEMS is very extensive. Bio-tech, Chemistry and engineering, for example, can use this technique to produce micro-devices. In wireless communication, many researches focus on high Q components, including inductors, capacitors and switches. High Q components can improve entire microwave system performance obviously. This thesis lies in producing the microwave switch component with high efficiency mainly. We can get desirable dimension of the structure by utilizing the electromagnetic suit software HFSS and mechanical suit software ANSYS. Various kinds of parameters such as size of etching holes, different kinds of dielectrics, and different thickness of bridge have been discussed. From simulations, the return loss is above 15dB, and insertion loss is less than 1dB on the condition of the frequency from DC to 40 GHz. Isolation can also reach the level of -20dB from 10 GHz to 40 GHz. These nice performance could not be paralleled by traditional PIN diodes and FET switches. After getting optimum simulation, we utilize the semiconductor machines at NDL to implement the circuits. From the optical microscope and the scanning electron microscope, we can see real circuit structure, and errors of fabrication can be observed clearly. We utilize a network analyzer to extract the S parameters. Due to some fabrication problems existed, the result of isolation has not been examined yet. Applying this switch circuit for the switchable beam antenna, we can verify the feasibility of reconfigurability.