Implementation of the Prognostic Expert System in Predictive Maintenance of a Semiconductor Plant Ultra-pure Water System

• Main Authors: Hsiang-Cheng Wang, 王翔正
• Other Authors: Sang-Chin Yang
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/35681100440389638222

碩士 === 國防大學中正理工學院 === 資訊科學研究所 === 95 === This research aims to explore the application of Prognostic Expert System in predictive maintenance for semiconductor Ultra-Pure Water System. This research has developed a Prognostic Expert System to predict and schedule the maintenance planning. Furthermore, this research has applied regularized maintenance skills into Prognostic Expert System for maintenance use. Case studies of Hsin-Chu Science Park are used in this research. First of all, based on the current conditions of the Ultra-Pure Water System, this research defines the study scope and construct a structure of Prognostic Expert System. According to the historical data and interview with experts, this research analyzes and defines Prognostic Expert System regulations so as to put this system into work. From the results, it can be seen that the developed Prognostic Expert System can successfully track the health conditions and predict any potential failure to avoid the system breakdown.