The Investigation of MEMS Nebulizer Nozzle Plate
碩士 === 元智大學 === 光電工程研究所 === 94 === This thesis includes two experimental parts. One is to make a nozzle plate for a nebulizer device and the other is to make a printhead of inkjet printer and both are made based on the micro electro mechanical system (MEMS) process. The devices made by micro electro...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94775883636383086068 |