| Summary: | 碩士 === 大同大學 === 材料工程學系(所) === 94 === Cathodic arc deposition (CAD) process is one of physical vapor deposition. Due to the advantages of high ion rate, more ions and high ion energy, the coatings own better adhesion, high density, high homogeneity, broader coating condition, lower substrate temperature and keeping homogeneity with target, the hard ceramic films coated on steel by CAD can improve its lifetime effectively.
CrN is easy to change to dense Cr2O3, so CrN have these properties, included high hardness, oxidation resistance at high temperature, low friction, corrosion and wear resistance. In some application, the hardness of CrN is lower than TiN or TiAlN, but its oxidation and wear resistance is better than both. Based on the relationship between CrN and Cr2O3, Cr(N,O)/CrN duplex films were coated by CAD by controlling the ratio of nitrogen and oxygen flow. A series of mechanical property measurement and analysis was deformed.
As shown in the experiment, the content of chromium of droplets is higher than the Cr2O3 coating. From EPMA and XPS analysis, the Cr(N,O)/CrN coatings included other compounds, ex: CrO3,Cr2N….etc, beside CrN and Cr2O3 known by XRD. Due to Cr2O3 have the higher residual compression stress, the Cr(N,O)/CrN coating was insufficient and affected the resistance erosion, but it had higher hardness and elastic modulus and lower friction. In the corrosion test, duplex coatings is superior to single coating.
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