Three-dimensional Airflow Analysis For AGV in Cleanroom
碩士 === 國立臺北科技大學 === 冷凍空調工程系所 === 94 === Dynamic simulation technique was used to study the airflow field of an AGV moving in the cleanroom area. Moving objects may destroy unidirectional airflow patterns in the cleanroom. In such a case, particles will also suspend in the vortex. All boundary condit...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/h35nbv |
| Summary: | 碩士 === 國立臺北科技大學 === 冷凍空調工程系所 === 94 === Dynamic simulation technique was used to study the airflow field of an AGV moving in the cleanroom area. Moving objects may destroy unidirectional airflow patterns in the cleanroom. In such a case, particles will also suspend in the vortex. All boundary conditions were set according to common industrial practices. The cases studied include: 1. A single AGV moving in the cleanroom; 2. An AGV with FOUP moving in the cleanroom, and 3. Variable Fan Filter Unit (FFU) coverage rate of the cleanroom. Also, a process tool is generating particles in the cleanroom. The result shows that when an AGV starts to move, vortexes created on both side of AGV. The inlet airflow can force the back flow from the raised floor from reaching to the upper side of the AGV. The airflow from the back side due to the moving motion will cause particles to stick on the back side surface of AGV.
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