Benchmark of Electronic Industry-- Wafer Plants、Panel Plants

• Main Authors: Yung-Pei Lin, 林永培
• Other Authors: 李宗興
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/z68z4c

碩士 === 國立臺北科技大學 === 冷凍空調工程系所 === 94 === The operating environment of the process required by electronic industry should be conducted in air-conditioned Clean Room. The air-conditioned system of Clean Room imposes great impact to the design, process, and acceptance rate of product and reliability of the electronic products. Thus, the comfortability of air-conditioned system required by Clean Room are different from conventional commercial, office building, general factory or hotel, it should maintain clean indoor air quality and certain temperature and humidity. Therefore, clean room required massive air change, the process exhaust is great, and needs accurate temperature and humidity control, so require, more energy than ordinary plant. The interview samples of this study are wafer plant, TFT-LCD panel plants of electronic industry, conducting energy consumption interview, analysis, establishing energy consumption benchmark. Understand work execution of energy conservation against the energy consumption benchmark of electronic industry, and conduct study subject to energy consumption benchmark of each plant, which include the flow of electric power balance energy of facility 、manufacturing industry, yield, total production process, seeking a reasonable, and unit energy consumption benchmark acceptable by the trade, become intrinsic energy conservation space of the future electronic plant.