Use Residual Stresses to Develop CMOS-Friendly RF MEMS Switches
碩士 === 國立臺北科技大學 === 機電整合研究所 === 94 === In this thesis, we present a novel MEMS-switch fabricated with CMOS process and extra post-process techniques of MEMS. A MEMS-switch includes controllable structure and two steady electrodes. The switch is driven by using electrostatic force. The force of attra...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69g932 |