Preparation and Surface Analysis of ITO Thin Film with Acetylactone

• Main Authors: Wen-Chin Hung, 洪文進
• Other Authors: Chao-chin Su
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/9dp6da

碩士 === 國立臺北科技大學 === 有機高分子研究所 === 94 === ITO ( Indium-Tin-Oxide ) thin film were prepared by Sol-gel with dip coating on the bare glass . The precursor of indium nitrate and tin chloride with alcohol mix acetylacetone by heat treatment atmosphere from ITO solution to thin film . The resultant of ITO films were characterized using scanning tunneling microscopy (STM) and mix different quantity of acetylactone . Depend on the laboratory research , the condition of thermal annealing with 550°C and 30 min , the sheet resistance of ITO to follow decrease and increase when add tin content and arrive in 8% , the sheet resistance of ITO about in 1400 Ω/sq. Depend on the result of experiment ,the density of transmittance over 90% when fix In/Sn ratio and add acetylactone before 0.4 mL . when acetylactone arrive in 0.5 mL and sheet resistance of ITO with minimum .