The Study of Pulsed Sputtering for ZrN films
碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 94 === ABSTRACT This research applies field mouth experiment method. We adopt the pure zirconiue as the target material, the glass as substrate, and then make use of magnetron sputtering in the experiment. After covering ZrN and plating layer into glass, we analyze...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46651106779775343159 |