The study of the film structure of Au(Be)/AlGaAs(100) wafer
碩士 === 國立臺灣科技大學 === 機械工程系 === 94 === The object of this thesis was to study the metallization layers of AuBe alloy on P-type AlGaAs(100) wafers. The Au/AuBe/Au layers were deposited onto the AlGaAs wafers by a thermal evaporation method. After the evaporation process the AlGaAs wafers were annealed...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53xf5d |