Elliptical microlens fabrication for enhancing optical fiber coupling efficiency

• Main Authors: Chi-cheng Hsui, 許吉成
• Other Authors: 趙振綱
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/x7u33d

碩士 === 國立臺灣科技大學 === 機械工程系 === 94 === The main purpose of this thesis is to make an elliptical microlens and put it on optical fibers. The spotlight characteristics of elliptical lens to increase the coupling efficiency, and reduce the losses of the light source signal to optic fibers, are included. The optical simulation-software “TracePro” to simulate the light coupling efficiency, which pass through the elliptical microlens and into the optical fiber, and Taguchi method to search the elliptical microlens profile for the best coupling efficiency, were studied. The positive photoresist AZ4620 was used in lithography process to exposure and develop, an elliptic cylinder onto a Si wafer. After thermal reflow, it became an ellipsoid. Then, electroforming the ellipsoid was used to form a concave mold. Finally, PDMS was injected into the mold and bake it. After depart the PDMS membrane from the mold, the elliptical microlens array was completed. An UV-curing glue was smeared and exposed to fasten the lens on the fiber.