Micro/Nano Scale Heat Transfer Analysis in Dielectric Thin Film
碩士 === 國立臺灣科技大學 === 機械工程系 === 94 === Manufacturing technologies develop with internal semiconductor and photoelectric industry. The problem about heat transfer of microelectronics or micromachines have entered from macroscale to microscale. This study discusses micro/nano scale heat transfer phenome...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/q5246h |
| Summary: | 碩士 === 國立臺灣科技大學 === 機械工程系 === 94 === Manufacturing technologies develop with internal semiconductor and photoelectric industry. The problem about heat transfer of microelectronics or micromachines have entered from macroscale to microscale. This study discusses micro/nano scale heat transfer phenomenon of one-dimension film in dielectric materials. Assume the condition of heat transfer is two-flux model, according to equation of phonon radiative transfer, using finite difference method to numerical analysis. Observes the distribution of temperature and heat flux in film when relax time、film properties and film materials change.
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