Micro/Nano Scale Heat Transfer Analysis in Dielectric Thin Film
碩士 === 國立臺灣科技大學 === 機械工程系 === 94 === Manufacturing technologies develop with internal semiconductor and photoelectric industry. The problem about heat transfer of microelectronics or micromachines have entered from macroscale to microscale. This study discusses micro/nano scale heat transfer phenome...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2006
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Online Access: | http://ndltd.ncl.edu.tw/handle/q5246h |