Time-resolved optical characterization of laser annealing si film with crystallization processing and lateral growth rate

Time-resolved optical characterization of laser annealing si film with crystallization processing and lateral growth rate

碩士 === 國立臺灣科技大學 === 電子工程系 === 94 === In this thesis,we measure melt duration of excimer laser annealing si film with HREC(Heat Retaining Layer Enhanced Crystallization) method by time-resolved optical reflection and transmission measurement system.Experiment results show that disc grain size enlarge...

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Bibliographic Details
Main Authors: Chun-jun Zhuang, 莊淳鈞
Other Authors: Wen-chang Yeh
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/nxbec3

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