Time-resolved optical characterization of laser annealing si film with crystallization processing and lateral growth rate
碩士 === 國立臺灣科技大學 === 電子工程系 === 94 === In this thesis,we measure melt duration of excimer laser annealing si film with HREC(Heat Retaining Layer Enhanced Crystallization) method by time-resolved optical reflection and transmission measurement system.Experiment results show that disc grain size enlarge...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/nxbec3 |