A Study on Electrostatic Actuated RF MEMS Switches with Low Actuation Voltage
碩士 === 國立臺灣大學 === 應用力學研究所 === 94 === This thesis includes design and fabrication of IC-compatible RF MEMS switch by MEMS technology. Compared to other actuation mechanisms, electrostatic RF MEMS switches have small footprint, extremely low power consumption, high switching speed, and ease of integr...
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| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74692954327690220676 |