Integrated testing chip for pressure sensor test
碩士 === 國立臺灣大學 === 應用力學研究所 === 94 === As the pressure sensor market grows, the wafer-level sensor testing becomes more and more important. A fast and cost-effective testing method is currently needed for the present pressure sensor manufacture. Inspired by the concept of air-bearing, a new testing me...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/72194223213592463647 |