| Summary: | 博士 === 國立臺灣大學 === 應用力學研究所 === 94 === The main work of this dissertation was to study flexible flat panel display with carbon nanotubes (CNTs), inclusive of the method to produce cathode and anode plates of display. Meanwhile, the simple method of package was showed. Besides using equipment in hand, some necessary experiment equipment was set up for completing experiments smoothly about the article like Direct Current Plasma-Enhanced Chemical Vapor Deposition (DC PECVD), Top Side Aligner, Field Emission Measurement System, 4-point Probes Measurement and UV-Vis Spectrophotometer.
The dissertation demonstrates that growing CNTs on plastic substrate was under the process with low temperature from 150℃ ~ 300℃. Generally speaking, the process of producing CNTs always needs high temperature and that is always over 500℃. Even if having the high manipulation of growing CNTs, the method still limits the choice of the substrate material and has influence on integration processes. This kind of process may damage other parts of element. It is a tough work of developing flexible flat panel display especially, because that flexible material is made of plastics and can’t accept so high temperature process. Therefore, we studied how to decrease the temperature in process to grow CNTs on flexible substrate. At the same time, using negative type photoresist, Aligner and suitable mask produced catalyst of Ni dots array to make CNTs be able to be grown on patterned area selectively, and then field emission display can be manufactured.
We also tried to mix negative type photoresist and nano Ni powder to be catalytic layer of growing CNTs. If succeeding to grow CNTs, the producing method of catalytic layer has an advantage of low cost.
In regard to the producing method of anode plate, ITO film was deposited by E-beam Evaporator and was heated sequentially to produce flexible and transparent conductive film. As to coating phosphor layer, negative type photoresist was available as binder mixed with phosphor, and the solution was spread on ITO/PES. On the side of package, using the thermal properties of SU-8 2015 (negative type photoresist) ran heating and curing process, and then the effect of vacuum package was got. This is quite simple and fresh method to use photoresist to make spacer by coating and curing directly.
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