| Summary: | 博士 === 國立臺灣大學 === 機械工程學研究所 === 94 === In recent years, micro-parts and micro-systems has been widely used in various applications such as information processing, optical communication, optoelectronics, flat panel display and bio-technology. With cost of paramount concern for many new micro-system applications, polymers are becoming one of the most practical materials for mass production. Micro-injection molding and micro-hot embossing are regarded as the two best mass-production methods to replicate microstructures and micro-parts. However, the processes involve high temperature, high pressure and require electroformed metal mold and expensive facilities. They are complicated, time-consuming batch-wise processes.
From this perspective, an innovative micro- and nano-stamping technology for rapid fabricating microstructure and micro-optical devices has been proposed and developed. This low pressure/low temperature stamping process reduces cycle time and allows continuous processing. The proposed technique uses a soft PDMS mold instead of the electroformed metal mold. To further improve the productivity, the process uses UV-curable photopolymer and employees UV light to cure the photo-polymer.
In this study, a micro and nano-stamping facility with UV exposure capacity has been designed, constructed and tested. The innovative low temperature/low pressure process has been used to fabricate polymer microlens arrays and black matrix devices. The cycle times are less than 20 seconds. The microlens arrays and black matrix devices have smooth surface and uniform property. The shape and height of micolens can be controlled with a proper combination of pressing pressure, pressing duration and UV curing dose. The thickness of black matrix can be adjusted by changing the concentration of black resin.
In summary, this low cost and high efficient method has many advantages over the conventional techniques. It is believed that the novel process is expected to give an impact to the micro-system fabrication technology and to create a highly value-added technology in optoelectronics industry.
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